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Error measurement and assemble error correction of a 3D-step-gauge
MAO Xinyong, LI Bin, SHI Hanmin, LIU Hongqi, LI Xi, LI Peigen
《机械工程前沿(英文)》 2007年 第2卷 第4期 页码 388-393 doi: 10.1007/s11465-007-0067-x
张国雄
《中国工程科学》 2000年 第2卷 第3期 页码 62-66
测量是获取信息的重要手段。科学研究、生产、高科技发展都离不开测量。测量技术发展的重要特点是它与信息技术的融合,这是提高测量精度、在线和动态测量、复杂参数和复杂环境下测量、智能测量的需要。这一融合贯穿始终,它包括信号调制与解调、采样与重构、信号融合、数据压缩、滤波、信号变换、时间序列分析、谱分析、数据拟合与建模、模式识别、神经网络、仿真与虚拟、误差分离、误差补偿、冗余技术、决策与智能技术等,它们互相支持。文章通过三坐标测量机误差补偿、圆度和轴系误差测量,以及大型工程的柔性坐标测量系统,介绍其在提高测量精度、优化、自标定、丢失信息自恢复、系统重组等方面的作用及其关键技术。
Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI
《机械工程前沿(英文)》 2017年 第12卷 第2期 页码 143-157 doi: 10.1007/s11465-017-0432-3
With the development of new materials and ultra-precision processing technology, the sizes of measured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. Self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral shearing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.
关键词: self-referenced measurement lateral shearing interferometry multi-probe error separation surface metrology
Measurement and analysis of typical motion error traces from a circular test
LI Xiaoli, LIU Huanlao
《机械工程前沿(英文)》 2008年 第3卷 第2期 页码 146-150 doi: 10.1007/s11465-008-0033-2
关键词: machine compensation direction combination desired efficient
Yin ZHANG, Jianwei WU, Kunpeng XING, Zhongpu WEN, Jiubin TAN
《机械工程前沿(英文)》 2020年 第15卷 第4期 页码 517-537 doi: 10.1007/s11465-020-0589-z
关键词: air-floating guide rail error transfer model driving and following structure dynamic error uncertainty evaluation Monte Carlo method
Study on the measurement of temperature field using laser holographic interferometry
Jinrong ZHU, Suyi HUANG, Wei LV, Huaichun ZHOU
《能源前沿(英文)》 2011年 第5卷 第1期 页码 120-124 doi: 10.1007/s11708-010-0107-9
关键词: temperature field flame error analysis holographic interferometry
Chord error constraint based integrated control strategy for contour error compensation
Tie ZHANG, Caicheng WU, Yanbiao ZOU
《机械工程前沿(英文)》 2020年 第15卷 第4期 页码 645-658 doi: 10.1007/s11465-020-0601-7
关键词: cross-coupling controller contour error tracking error position error compensator feed rate regulator
一种针对测试误差、参数误差和负荷突变故障分析的多功能动态状态估计器 Article
Mehdi AHMADI JIRDEHI,Reza HEMMATI,Vahid ABBASI,Hedayat SABOORI
《信息与电子工程前沿(英文)》 2016年 第17卷 第11期 页码 1218-1227 doi: 10.1631/FITEE.1500301
立体偏转测量系统几何参数的性能分析与评价 Article
徐永佳, 高峰, 蒋向前
《工程(英文)》 2018年 第4卷 第6期 页码 806-815 doi: 10.1016/j.eng.2018.10.007
本文提出了一种新颖的几何参数分析方法,以提高立体偏转系统的测量精度。立体偏转测量可用于获得自由曲面的三维形貌信息。基于立体偏转测量的测量系统通常由条纹显示屏、主相机和参考相机组成。立体偏转测量系统组件的布置对于实现高精度测量十分重要。本文分析和评估了立体偏转测量系统的4个几何参数:主相机与被测物体表面之间的距离、主相机光线与被测表面法线之间的角度、条纹显示屏与被测物体之间的距离,以及主相机和参考相机之间的角度。本文通过模拟和实验数据对这些几何参数对测量精度的影响进行了验证。实验结果证实了这些参数对测量精度的影响。基于本文所提出的分析方法,一个立体偏转系统被搭建并且被用于测量一个标准的凹面镜。通过与凹面镜的给定表面参数进行比较,该系统的全局测量精度可达154.2 nm。
Kinematic error separation on five-axis NC machine tool based on telescoping double ball bar
Min WANG, Jianzhong HU, Tao ZAN
《机械工程前沿(英文)》 2010年 第5卷 第4期 页码 431-437 doi: 10.1007/s11465-010-0110-1
关键词: error modeling error separation telescoping double ball bar five-axis numerical control (NC) machining tool
Robust ensemble of metamodels based on the hybrid error measure
《机械工程前沿(英文)》 2021年 第16卷 第3期 页码 623-634 doi: 10.1007/s11465-021-0641-7
关键词: metamodel ensemble of metamodels hybrid error measure stochastic problem
density measurement for plastic injection molding via ultrasonic technology
《机械工程前沿(英文)》 2022年 第17卷 第4期 doi: 10.1007/s11465-022-0714-2
关键词: ultrasonic measurement melt density in-situ measurement injection molding
Hao QIN, Shenwei ZHANG, Wenxing ZHOU
《结构与土木工程前沿(英文)》 2013年 第7卷 第3期 页码 276-287 doi: 10.1007/s11709-013-0207-9
关键词: pipeline metal-loss corrosion inverse Gaussian process measurement error hierarchical Bayesian Markov Chain Monte Carlo (MCMC)
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
《机械工程前沿(英文)》 2013年 第8卷 第2期 页码 146-149 doi: 10.1007/s11465-013-0260-z
To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.
关键词: Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency error sensitivity
标题 作者 时间 类型 操作
Error measurement and assemble error correction of a 3D-step-gauge
MAO Xinyong, LI Bin, SHI Hanmin, LIU Hongqi, LI Xi, LI Peigen
期刊论文
Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probeerror separation
Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI
期刊论文
Measurement and analysis of typical motion error traces from a circular test
LI Xiaoli, LIU Huanlao
期刊论文
Evaluation of measurement uncertainty of the high-speed variable-slit system based on the Monte Carlo
Yin ZHANG, Jianwei WU, Kunpeng XING, Zhongpu WEN, Jiubin TAN
期刊论文
Study on the measurement of temperature field using laser holographic interferometry
Jinrong ZHU, Suyi HUANG, Wei LV, Huaichun ZHOU
期刊论文
Chord error constraint based integrated control strategy for contour error compensation
Tie ZHANG, Caicheng WU, Yanbiao ZOU
期刊论文
一种针对测试误差、参数误差和负荷突变故障分析的多功能动态状态估计器
Mehdi AHMADI JIRDEHI,Reza HEMMATI,Vahid ABBASI,Hedayat SABOORI
期刊论文
Kinematic error separation on five-axis NC machine tool based on telescoping double ball bar
Min WANG, Jianzhong HU, Tao ZAN
期刊论文
Inverse Gaussian process-based corrosion growth modeling and its application in the reliability analysis for energy pipelines
Hao QIN, Shenwei ZHANG, Wenxing ZHOU
期刊论文